Abstract: This paper reports the research progress of high precision VLBI technology used for single-spacecraft orbit determination and same beam VLBI technique used for multi-spacecraft position determination. The ΔDOR VLBI residual delay after determining orbit of Chang'e-3 Lander is 0.67 ns, and the error of differential phase delay between the Lander and Yutu rover of Chang'e-3 is down to 0.3 ps. By using the differential phase delay data, the rover motions such as movement and turning as small as several centimeters are monitored, and the relative position between the rover and the Lander is precisely measured with an accuracy of 1 meter. For deep space exploration, further research works are put forward to improve the VLBI delay measurement accuracy.